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Electrical profiles of Graded-Ge SiGe films: A New ALPro Capability

Scotts Valley, CA November 30, 2023 

As is known in industry ALP’s Differential Hall Effect Metrology (DHEM) systems measure electrical depth profile datasets that provide complete information on carriers, resistivity and mobility at any depth within an activated semiconductor layer at very high resolutions. Traditional sheet resistance or Hall mobility measurement apparatus can only provide a single point bulk measurement, whereas ALPro(TM) tools yield data that show how electrical properties vary as a function of depth.  

In advanced node technologies, SiGe has gained much importance in recent years.  Interpretation of bulk measurement data obtained from complex film stacks comprising SiGe layers with varying composition has become a challenge. In response to this challenge, we are proud to announce a new capability of ALPro-100 tools for acquiring accurate depth profiles of carriers, resistivity and mobility through SiGe stacks with variable Ge content (see the illustrative examples below).  

Please request more information by emailing