At FCMN 2019 in Monterey California, Active Layer Parametrics presented near-surface activation depth profiles for Phos:Ge and co-doped Sb & Phos:Ge with a depth resolutions of <1nm. This project was a collaboration with Stanford Univeristy and EAG Laboratories. Data was collected using the ALPro-50 DHEM profiler. Data provides direct activation profiles which complements the chemical compositional profiles captured by SIMS.
Link: http://www2.avs.org/conferences/FCMN/